Summary of SVT Wafer tests
performed at Ohio State University

Summarized Results
Batch total #
of wafers 		# bad percent
yield
A 35 11 69%
B 48 22 54%
C 65 26 60%
TOTAL 148 59 60%

Probe Station Results
Detectors Volt.
Lin.		 GA
current
mircoA		 anode
current
nA		 number
of bad
anodes*		 Date Comments
SI-32   10.0 10   5-98
SI-42   100 0.1 30 6-98
SI-45   30.0 20   6-98
SI-48   20.0 20 10 6-98
SI-57   high     6-98
SI-60   0.3 1   6-98
SI-61   0.4 0.05   6-98
SI-62   1.9 5   7-98
SI-66   0.6 0.7 100 6-98
SI-67   15.0 25   7-98
SI-75   1.1 5   7-98
SI-77   0.7 0.2   7-98
SI-78   0.9 0.1   7-98
SI-84   31.0 100 15 7-98 all anodes>100nA
SI-86   1.6 3 2 7-98
SI-89   0.8 0.4   7-98
SI-90   0.5 0.2   6-98
SI-91   1.0 4   7-98
SI-92   4.0 10   7-98
SI-94   1.7 0.8   7-98
SI-95         7-98 short #50-#60
SI-96   0.5 0.6   7-98
SI-98   1.1 6   7-98
SI-101   3.0 10 6 7-98

Probe Station Results SI Measurements
Detectors Volt.
Lin.		 GA
current
microA		 anode
current
nA		 number
of bad
anodes*		 Date Comments Resistivity
(KOhms)		 Diode Currents
(pA)
SI-21   1.1 6   9-98 833 105
162
SI-36   57.5 9 7 9-98 563 149
164
SI-37   115 15 5 9-98 #190 + focusing 592 252
1040
SI-39   25.0 1   9-98 741 1030
1015
SI-40   12.0 6 12 9-98 596 250
1180
SI-47   1.2 4   9-98 695 126
116
SI-68   32.0 60 9 9-98 689 195
200
SI-76   32.0 10   9-98 573 518
700
SI-82   130 120 1 9-98 all anodes>100nA 790 363
253
SI-87   1.8 4   9-98 770 129
79
SI-122   32.0 10 2 9-98 629 190
208

Probe Station Results for B batch
Detectors Volt.
Lin.		 GA
current
mircoA		 anode
current
nA		 number
of bad
anodes*		 Date Comments
SI-1B   7.1 0.1 30 2-99 anode-E1 breakdown
SI-11B   98.0 3 18 2-99
SI-16B   20.4 50 35 7-99
SI-28B   30.0 0.1   2-99
SI-30B   0.7 5   2-99
SI-31B   0.5 0.6   2-99
SI-33B   70.7 10,000 150 7-99 anode-E1 breakdown
SI-57B   21.0 0.1 11 2-99
SI-58B   32.0 25 8 3-99
SI-60B   32.0 15 13 2-99
SI-68B   22.0 10   2-99
SI-69B   0.3 1   2-99
SI-73B   0.2 0.3 1 2-99 scratches on anodes
SI-74B   50.7 0.1   2-99
SI-75B   166 50 19 1-99
SI-76B   24.0 5 2 2-99
SI-77B   0.5 1   2-99
SI-81B   0.5 0.1   1-99
SI-82B   30.0 6   1-99
SI-83B   0.4 0.2   1-99
SI-85B   16.0 25   1-99
SI-86B   1.5 0.1   3-99
SI-87B   8.0 0.2   3-99
SI-88B   62.0 0.5 2 3-99 anode-E1 breakdown
SI-89B   3.0 0.5   1-99
SI-90B   28.0 0.1 2 3-99
SI-91B   53.0 30 1 3-99
SI-92B   3.8 1   3-99
SI-93B   11.3 40 2 7-99
SI-94B   45.0 70 12 3-99
SI-95B   3.3 6   1-99
SI-97B   4.4 0.1   1-99
SI-98B   121 0.1   3-99
SI-99B   82.0 1 7 3-99
SI-100B   27.5 0.1   3-99
SI-102B   23.0 6   3-99
SI-103B   8.0 10   3-99
SI-104B   6.0 0.2   1-99
SI-107B   5.2 0.1   3-99
SI-108B   5.2 0.1   3-99
SI-109B   131 100 13 1-99
SI-110B   128 2 3 3-99 anode-E1 breakdown
SI-113B   20.0 1   3-99 anode-E1 breakdown
SI-114B   123 70 3 3-99 anode-E1 breakdown
SI-115B   5.5 6   1-99
SI-116B   132 3 1 3-99 anode-E1 breakdown
SI-118B   60.0 0.8 2 3-99 anode-E1 breakdown
SI-121B   53.0 30 4 3-99 anode-E1 breakdown

Probe Station Results for C batch
Detectors Volt.
Lin.		 GA
current
mircoA		 anode
current
nA		 number
of bad
anodes*		 Date Comments
SI-6C   32.9 200 100 8-99
SI-12C   63.0 10 1 6-99
SI-13C   9.9 30 1 6-99
SI-16C   0.4 0.4   6-99
SI-18C   6.5 10 6 8-99
SI-19C   16.7 100 9 8-99
SI-25C   4.3 7   8-99
SI-27C   12.3 0.9 6 8-99 anode-E1 breakdown
SI-30C   1.4 1   7-99
SI-31C   0.4 3   8-99
SI-32C   0.8 1   7-99
SI-33C   2.2 10   8-99
SI-34C   0.4 0.4   8-99
SI-35C   1.1 4   8-99
SI-36C   1.8 7   8-99
SI-39C   9.8 6 4 8-99
SI-40C   35.5 0.4 11 8-99 anode-E1 breakdown
SI-41C   4.3 0.5 4 8-99
SI-47C   1.5 5   8-99
SI-48C   20.1 4 15 8-99
SI-49C   1.4 5   8-99
SI-50C   2.5 10   8-99
SI-53C   13.2 3 3 8-99
SI-54C   53.5 1000 101 8-99
SI-58C   0.6 4   6-99
SI-59C   35.0 80   6-99 all anodes>70nA
SI-63C   67.1 100 53 7-99
SI-64C   52.2 100 42 7-99
SI-71C   37.0 90   6-99 all anodes>70nA
SI-72C   55.0 70   6-99 all anodes>70nA
SI-75C   43.3 60 13 7-99
SI-79C   2.6 10   7-99
SI-80C   16.9 70   6-99
SI-81C   13.6 0.7 1 6-99 anode-E1 breakdown
SI-85C   63.1 1 5 6-99 anode-E1 breakdown
SI-86C   265 20 4 6-99 anode-E1 breakdown
SI-87C   14.3 11 2 6-99
SI-88C   8.0 10   6-99
SI-89C   28.3 10 1 6-99 anode-E1 breakdown
SI-92C   5.9 0.5 1 6-99
SI-94C   37.3 5   6-99
SI-95C   33.4 15 15 6-99
SI-96C   18.8 10 4 7-99
SI-97C   63.7 2 20 8-99
SI-98C   6.2 30   7-99
SI-99C   29.5 9 11 7-99
SI-101C   0.7 0.7   8-99
SI-102C   137 0.1 4 7-99 anode-E1 breakdown
SI-103C   120 0.1 4 7-99 anode-E1 breakdown
SI-105C   106 0.08 3 7-99 anode-E1 breakdown
SI-107C   29.5 10 6 7-99
SI-108C   104 0.1 7 7-99 anode-E1 breakdown
SI-109C   2.6 3   8-99
SI-110C   0.4 1   7-99
SI-111C   0.7 0.9 1 8-99
SI-112C   0.3 0.3   7-99
SI-114C   0.2 0.2   7-99
SI-115C   0.9 2   7-99
SI-116C   0.8 3   8-99
SI-117C   0.4 0.2   7-99
SI-118C   35.8 10 3 8-99
SI-121C   0.5 0.4   7-99
SI-122C   1.4 9   7-99
SI-123C   16.8 1   8-99
SI-124C   2.4 2 3 7-99

Criteria
 Anode current below 150nA
Guard Anode current below 50uA
Voltage linearity better than +-2V
Diode current measured at 100V


* a bad anode is an anode with current greater than 150nA

  OK
  Does not meet requirements

More about the Star Experiment The Ohio State University Physics Department

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Last modified 8/27/99